An innovative wafer inspection tool developed by a team of Vanderbilt professors and engineers has been licensed exclusively to startup company Femtometrix. The semiconductor wafer-inspection technology based on laser optics was invented by Norman Tolk, Ph.D., professor of physics, Michael Alles, engineer for ÃÛÌÒÖ±²¥â€™s School of Engineering, and Ron Schrimpf, Ph.D., professor of electrical engineering.